Prediction of Axial Variation of Plasma Potential in Helicon Plasma Source Using Linear Regression Techniques
نویسندگان
چکیده
منابع مشابه
Thrust Measurements of a Helicon Plasma Source
There is interest in using a helicon plasma source in propulsive applications as both an ion source and as a thruster. Developing a helicon thruster requires a performance baseline as a basis for future optimization and expansion. The thrust of a helicon is measured using an null-type inverted pendulum thrust stand at a pressure of 2x10 -5 Torr through the operating range of 215-840 W RF power,...
متن کاملPlasma Acceleration in a Compact Helicon Source Using RF Antennae
Kyoichiro Toki, Tokyo University of Agriculture and Technology, 2-24-16 Naka-cho, Koganei-city, Tokyo 184-8588 JAPAN Shunjiro Shinohara, Kyushu University, 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, JAPAN Takao Tanikawa, Tokai University, 1117 Kitakaname, Hiratsuka, Kanagawa 259-1292, JAPAN Tohru Hada, Kyushu University, 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, JAPAN Ikkoh Funaki, Japan Aeros...
متن کاملExperimental Measurements and Modeling of a Helicon Plasma Source with Large Axial Density Gradients
An investigation of wave magnetic field, density and temperature profiles, electron distribution function and wave-correlated Argon optical emission in a helicon plasma source is carried out. Diagnostics include Langmuir and wave magnetic field probes, interferometer, monochromator, and retarding field energy analyzer. The UW helicon experimental facility operates with argon pressures in the ra...
متن کاملHelicon plasma source for ionized physical vapor deposition
A helicon antenna that sits remotely outside the vacuum system is attached to a magnetron sputtering system. This increases the electron temperature, which increases the ionization of the sputter flux for achieving ionized physical vapor deposition (IPVD). There are no shadowing and contamination problems, unlike other IPVD devices with immersed coils, since the helicon antenna is outside the v...
متن کاملLarge-area helicon plasma source with permanent magnets
Abstract A helicon plasma source has been designed using annular permanent magnets to produce the required DC magnetic field (B-field). With the discharge tube located in the remote field, rather than the internal field of the magnet rings, the plasma can be injected into a processing chamber containing the substrate to be treated. The discharge tube, radiofrequency (RF) antenna and magnet size...
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ژورنال
عنوان ژورنال: International Journal of Mathematical, Engineering and Management Sciences
سال: 2020
ISSN: 2455-7749
DOI: 10.33889/ijmems.2020.5.6.095